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--->2003XJ High End 8" Wafer Inspection Microscopes

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2003XJ
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1  Optic System: Infinity optic system and Its EPI Illuminator
2  Tube Lens Focusing Distance: f¡ä=200mm
3
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 Bright/Dark field plan Semi-APO Objectives, parfocus 45MM:
 5¡Á/0.1,  10¡Á/0.25,  20¡Á/0.40,  40¡Á/0.65,  60X/0.85(APO)
4  Optional bright/Dark field plan APO objectives 100¡Á/0.9(dry)£¬150¡Á/1.25(Water)
5  Eyepiece: ESWF10X/25MM high eye point
6
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 Stage: Large mechanical stage with glass plate
 (Size: 200 x 180mm) and moving range 156mm x 150mm)
7
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 EPI Illuminator:
 12V/50W Halogen lamp with field diaphragm & Iris diaphragm, with polarizer & analyzer
8  Coaxial coarse/Fine focus system with coaxial coarse focus moving range 45mm
9
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 Compensation binocular and trinocular head (inclination of 30¡ã).
 The inside diameter of Eyepiece tube is 30mm
10  Nosepiece: Quintuple, thread of objective is M27 X 0.75
11  Optional transmitted light source with collector lens and abbe condenser will be available
12  Outside dimension of microscope: 540¡Á360¡Á458mm (L¡ÁW¡ÁH)
13  Power Supply 220V or 110V